|
| Contact Information |
|
|
* Company
Name: |
|
* Contact
Name: |
|
|
* Phone
Number: |
|
* Fax
Number: |
|
|
* Email
Address: |
|
* Request
Date: |
|
|
Date EPI Required: |
|
* Device: |
|
|
* Quantity
Requested: |
|
|
|
|
| Substrate Information |
|
Supplied
By: |
|
* Growth
Method: |
|
|
* Diameter: |
|
* Type: |
|
|
* Dopant: |
|
* Orientation: |
|
|
* Angle
Offset: |
|
* Resistivity
Range: |
|
|
* Thickness
Range: |
|
* Backside
Conditions: |
|
|
* Sb Buried
Layer: |
|
* As Buried
Layer: |
|
|
* B Buried
Layer: |
|
|
|
|
| EPI Requirements
|
|
* Layer 1
Thickness Target: |
|
* Layer 1
Thickness LSL: |
|
|
Transition
Width: |
|
* Layer 1
Thickness USL: |
|
|
* Layer 1 Resistivity Target: |
|
* Layer 1 Resistivity LSL: |
|
|
|
|
* Layer 1
Resistivity USL: |
|
|
Layer 2
Thickness Target: |
|
Layer 2
Thickness LSL: |
|
|
|
|
Layer 2
Thickness USL: |
|
|
Layer 2
Resistivity Target: |
|
Layer 2
Resistivity LSL: |
|
|
|
|
Layer 2
Resistivity USL: |
|
|
* Source
Gas: |
|
* Dopant
Gas: |
|
|
* Type: |
|
|
|
|
| Evaluation Method |
|
* Thickness: |
|
* Resistivity: |
|
|
* Inspection
Criteria: |
|
|
|
|
|
|
|
|