Polysilicon coating services for silicon carbide and quartz products for use in single wafer and cluster tool RTP, CVD, and Etch chambers.
The polysilicon coating extends the life of parts such as bell jars, isolation chambers, liners, rings, shower heads, gas distribution plates, robot blades, etc. which are exposed to highly corrosive chemicals in the semiconductor manufacturing process.
Extending the cycle that the machines can be run without downtimefor maintenance is a major payback for the investment in polycoating of the ceramic components. |
